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Journal description
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Details for article 15 of 77 found articles
| Title: |
Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen |
| Author: |
Hamui, L. Monroy, B.M. Kim, K.H. López-Suárez, A. Santoyo-Salazar, J. López-López, M. Roca i Cabarrocas, P. Santana, G. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 41 (2016) nr. C pages 8 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 77 found articles
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