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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 29 of 78 found articles
| Title: |
Gate oxide integrity dependence on substrate characteristics and SiO2 thickness |
| Author: |
Bonoli, F. Godio, P. Borionetti, G. Falster, R. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 4 (2001) nr. 1-3 pages 145-148 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 78 found articles
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