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Journal description
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Details for article 27 of 38 found articles
| Title: |
Structural and light emitting properties of silicon-rich silicon nitride films grown by plasma enhanced-chemical vapor deposition |
| Author: |
Torchynska, T.V. Casas Espinola, J.L. Khomenkova, L. Vergara Hernandez, E. Andraca Adame, J.A. Slaoui, A. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 37 (2015) nr. C pages 5 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 27 of 38 found articles
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