Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiN x interlayer grown on 6H-SiC substrate by metal–organic chemical vapor deposition
Titel:
Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiN x interlayer grown on 6H-SiC substrate by metal–organic chemical vapor deposition