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Journal description
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Details for article 5 of 11 found articles
| Title: |
Neural network modeling of PECVD silicon nitride films |
| Author: |
Ghosh, S. Dutta, P.K. Bose, D.N. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 2 (1999) nr. 1 pages 11 p. |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 11 found articles
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