Systematic analysis of the trapping and reliability of Al2O3/GaN MOS capacitors with different atomic layer deposition techniques
Title:
Systematic analysis of the trapping and reliability of Al2O3/GaN MOS capacitors with different atomic layer deposition techniques
Author:
Fregolent, Manuel Tomasi, Marco De Santi, Carlo Buffolo, Matteo Tadmor, Liad Brusaterra, Enrico Treidel, Eldad Bahat Cester, Andrea Meneghesso, Gaudenzio Zanoni, Enrico Meneghini, Matteo