High-pressure sputtering deposition and in situ plasma oxidation of TiOx thin films as electron selective contact for photovoltaic applications
Titel:
High-pressure sputtering deposition and in situ plasma oxidation of TiOx thin films as electron selective contact for photovoltaic applications
Auteur:
Pérez-Zenteno, F. García-Hemme, E. Torres, I. Barrio, R. Duarte, S. Benítez-Fernández, R. Caudevilla, D. García-Hernansanz, R. Olea, J. Pastor, D. Prado, A. del San Andrés, E.