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Journal description
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Details for article 14 of 145 found articles
| Title: |
A novel preparation method of micron Ta2O5 film based on temperature-controlled thermal bubble resistor and its properties study |
| Author: |
Liu, Jingwen Liu, Demeng Wang, Kun Guan, Yimin Zhang, Tingting Wang, Penghui |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 185 () nr. C pages p. |
| Year: |
2025 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 145 found articles
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