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Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications |
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Titel: |
Investigation of amorphous-SiC thin film deposition by RF magnetron sputtering for optical applications |
Auteur: |
Chaussende, Didier Tabouret, Vincent Crisci, Alexandre Morais, Magali Coindeau, Stéphane Berthomé, Gregory Kollmuss, Manuel Wellmann, Peter Jomard, François Pinault-Thaury, Marie-Amandine Lu, Yaoqin Shi, Xiaodong Ou, Haiyan |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 182 () nr. C pagina's p. |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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