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Journal description
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Details for article 31 of 43 found articles
| Title: |
Numerical and experimental investigation of the effect of side injectors on the deposition rate near the wafer edge during atmospheric pressure chemical vapor deposition |
| Author: |
Le, Ba-Phuoc Lin, Wei-Jie Chen, Jyh-Chen Hu, Chieh Tu, Chun-Chin Chen, Liang-Chin |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 172 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 43 found articles
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