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Journal description
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Details for article 44 of 48 found articles
| Title: |
The study and optimization of ICP deep etching at a low-temperature for InP solid-immersion metalens fabrication |
| Author: |
Zhu, Yicheng Wang, Wenjuan Zhou, Min Qu, Huidan Li, Guanhai Chen, Pingping Lu, Wei |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 166 () nr. C pages p. |
| Year: |
2023 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 44 of 48 found articles
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