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Journal description
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Details for article 36 of 48 found articles
| Title: |
Polarity control of sputter-deposited AlN with high-temperature face-to-face annealing |
| Author: |
Shojiki, Kanako Uesugi, Kenjiro Xiao, Shiyu Miyake, Hideto |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 166 () nr. C pages p. |
| Year: |
2023 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 36 of 48 found articles
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