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Influences of lattice strain and SiGe buffer layer thickness on electrical characteristics of strained Si/SiGe/Si(110) heterostructures |
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Titel: |
Influences of lattice strain and SiGe buffer layer thickness on electrical characteristics of strained Si/SiGe/Si(110) heterostructures |
Auteur: |
Fujisawa, Taisuke Onogawa, Atsushi Horiuchi, Miki Sano, Yuichi Sakata, Chihiro Yamanaka, Junji Hara, Kosuke O. Sawano, Kentarou Nakagawa, Kiyokazu Arimoto, Keisuke |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 161 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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