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Application of SCF-LTDP technology for a-Si:H film defective passivation in X-ray PIN-based photosensor |
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Titel: |
Application of SCF-LTDP technology for a-Si:H film defective passivation in X-ray PIN-based photosensor |
Auteur: |
Chen, Jian-Jie Chen, Min-Chen Chang, Ting-Chang Chen, Hong-Chih Zhou, Kuan-Ju Kuo, Chuan-Wei Yang, Chih-Cheng Wu, Pei-Yu Shih, Chih-Cheng Huang, Jen-Wei |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 156 () nr. C pagina's p. |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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