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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 17 found articles
| Title: |
Direct observation of local atomic structure in arsenic implanted silicon |
| Author: |
Yamazaki, H. Yoshiki, M. Takaishi, R. Takeno, S. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 15 (2012) nr. 6 pages 6 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 17 found articles
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