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                                       Details for article 4 of 17 found articles
 
 
  Direct observation of local atomic structure in arsenic implanted silicon
 
 
Title: Direct observation of local atomic structure in arsenic implanted silicon
Author: Yamazaki, H.
Yoshiki, M.
Takaishi, R.
Takeno, S.
Appeared in: Materials science in semiconductor processing
Paging: Volume 15 (2012) nr. 6 pages 6 p.
Year: 2012
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 17 found articles
 
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