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Journal description
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Details for article 16 of 36 found articles
| Title: |
High quality of N-polar GaN film fabricated by layer transfer technology using high selective material removal rate of CMP |
| Author: |
Yu, Zicheng Zhang, Li Yu, Guohao Deng, Xuguang Jiang, Chunyu Tang, Wenxin Yin, Haotian Liu, Weining Chen, Zhang Zhang, Baoshun |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 141 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 36 found articles
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