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Journal description
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Details for article 7 of 33 found articles
| Title: |
Defect reduction in SiC epilayers by different substrate cleaning methods |
| Author: |
Baierhofer, D. Thomas, B. Staiger, F. Marchetti, B. Förster, C. Erlbacher, T. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 140 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 33 found articles
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