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Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current |
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Title: |
Scallop-shaped p-type FinFETs with improved short-channel effects immunity and driving current |
Author: |
Zhang, Zhaohao Gan, Weizhuo Li, Junjie Kong, Zhenzhen Han, Yanchu Liu, Yang Wang, Guilei Wu, Zhenhua Yu, Jiahan Zhang, Qingzhu Xu, Gaobo Zhang, Yongkui Xiang, Jinjuan Yin, Huaxiang Luo, Jun Wang, Wenwu |
Appeared in: |
Materials science in semiconductor processing |
Paging: |
Volume 140 () nr. C pages p. |
Year: |
2022 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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