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Journal description
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Details for article 36 of 60 found articles
| Title: |
Proximity gettering design of silicon wafers using silicon hydride and hydrocarbon mixture molecular ion implantation technique |
| Author: |
Hirose, Ryo Kadono, Takeshi Onaka-Masada, Ayumi Okuyama, Ryosuke Kobayashi, Koji Suzuki, Akihiro Koga, Yoshihiro Kurita, Kazunari |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 135 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 36 of 60 found articles
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