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Journal description
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Details for article 35 of 62 found articles
| Title: |
Numerical investigation on material removal mechanism in elliptical vibration cutting of single-crystal silicon |
| Author: |
Liu, Changlin Zhang, Jianguo Zhang, Junjie Chu, Jianning Chen, Xiao Xiao, Junfeng Xu, Jianfeng |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 134 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 35 of 62 found articles
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