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Effect of off-axis substrate angles on β-Ga2O3 thin films and solar-blind ultraviolet photodetectors grown on sapphire by MOCVD |
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Titel: |
Effect of off-axis substrate angles on β-Ga2O3 thin films and solar-blind ultraviolet photodetectors grown on sapphire by MOCVD |
Auteur: |
Ma, Yongjian Tang, Wenbo Chen, Tiwei Zhang, Li He, Tao Zhou, Xin Wei, Xing Deng, Xuguang Fu, Houqiang Xu, Kun Zhang, Xiaodong Zhang, Baoshun |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 131 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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