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Journal description
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Details for article 1 of 22 found articles
| Title: |
A study of the effect of post-metal etch wet cleaning processes and silicon oxynitride film on charge induced corrosion of tungsten vias |
| Author: |
Lee, Szetsen Ni, Chi-Jung |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 13 (2010) nr. 5-6 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 22 found articles
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