Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films
Titel:
Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films
Auteur:
Terekhov, Vladimir A. Nesterov, Dmitriy N. Barkov, Konstantin A. Domashevskaya, Evelina P. Konovalov, Aleksandr V. Fomenko, Yuriy L. Seredin, Pavel V. Goloshchapov, Dmitry L. Popov, Anatoliy I. Barinov, Aleksey D. Andreeshchev, Vyacheslav M. Zanin, Igor E. Ivkov, Sergey A. Loktionova, Oksana E.