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Journal description
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Details for article 22 of 53 found articles
| Title: |
High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density |
| Author: |
Poyai, A. Bunjongpru, W. Klunngien, N. Porntheerapat, S. Hruanan, C. Sopitpan, S. Nukeaw, J. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 11 (2008) nr. 5-6 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 53 found articles
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