|
Effects of electron and proton irradiation on embedded SiGe source/drain diodes |
|
|
|
Title: |
Effects of electron and proton irradiation on embedded SiGe source/drain diodes |
Author: |
Ohyama, H. Nagano, T. Takakura, K. Motoki, M. Matsuo, K. Nakamura, H. Sawada, M. Midorikawa, Kuboyama, S. Gonzalez, M.B. Simoen, E. Claeys, C. |
Appeared in: |
Materials science in semiconductor processing |
Paging: |
Volume 11 (2008) nr. 5-6 pages 4 p. |
Year: |
2008 |
Contents: |
|
Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|