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Journal description
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Details for article 17 of 36 found articles
| Title: |
Impact of Si(100) doping methods on TiSi2 formation in vertical and horizontal FET structure areas with increasing aspect ratio |
| Author: |
Hößler, Diana |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 109 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 36 found articles
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