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Experimental study of the ultrathin oxides on SiGe alloy formed by low-temperature ozone oxidation |
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Titel: |
Experimental study of the ultrathin oxides on SiGe alloy formed by low-temperature ozone oxidation |
Auteur: |
Ma, Xueli Wang, Xiaolei Zhou, Lixing Xu, Hao Zhang, Yuanyuan Duan, Jiahui Xiang, Jinjuan Yang, Hong Li, Junjie Li, Yongliang Yin, Huaxiang Wang, Wenwu |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 107 () nr. C pagina's p. |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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