Ultra-high phosphorus-doped epitaxial Ge layers grown by HWCVD method on Si substrates
Titel:
Ultra-high phosphorus-doped epitaxial Ge layers grown by HWCVD method on Si substrates
Auteur:
Shengurov, Vladimir Denisov, Sergei Chalkov, Vadim Trushin, Vladimir Zaitsev, Andrei Prokhorov, Dmitry Filatov, Dmitry Zdoroveishchev, Anton Ved, Mikhail Kudrin, Alexey Dorokhin, Mikhail Buzynin, Yuri