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                                       Details for article 6 of 26 found articles
 
 
  Effect of stress on silicide formation kinetics in thin film titanium–selicon system
 
 
Title: Effect of stress on silicide formation kinetics in thin film titanium–selicon system
Author: Nagabushnam, Rajan V
Singh, Rajiv K
Sharan, Sujit
Appeared in: Materials science in semiconductor processing
Paging: Volume 1 (1998) nr. 3-4 pages 7 p.
Year: 1998
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 26 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands