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Journal description
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Details for article 12 of 51 found articles
| Title: |
Electron holographic characterization of nanoscale charge distributions for ultra shallow PN junctions in Si |
| Author: |
Chakraborty, P.S. McCartney, M.R. Li, J. Gopalan, C. Singisetti, U. Goodnick, S.M. Thornton, T.J. Kozicki, M.N. |
| Appeared in: |
Physica. E, Low-dimensional systems and nanostructures |
| Paging: | Volume 19 (2003) nr. 1-2 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 51 found articles
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