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Impact of temperature on chlorine contamination and segregation for Ti(C,N) CVD thin hard coating studied by nano-SIMS and atom probe tomography |
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Titel: |
Impact of temperature on chlorine contamination and segregation for Ti(C,N) CVD thin hard coating studied by nano-SIMS and atom probe tomography |
Auteur: |
Azhari, Idriss El Barrirero, Jenifer Valle, Nathalie García, José von Fieandt, Linus Engstler, Michael Soldera, Flavio Llanes, Luis Mücklich, Frank |
Verschenen in: |
Scripta materialia |
Paginering: |
Jaargang 208 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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