Correlating structural and mechanical properties of AlN/TiN superlattice films
Titel:
Correlating structural and mechanical properties of AlN/TiN superlattice films
Auteur:
Koutná, Nikola Řehák, Petr Chen, Zhuo Bartosik, Matthias Fallmann, Markus Černý, Miroslav Zhang, Zaoli Friák, Martin Šob, Mojmír Mayrhofer, Paul H. Holec, David