Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives
Titel:
Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives
Auteur:
Barnes, J.P. Grenier, A. Mouton, I. Barraud, S. Audoit, G. Bogdanowicz, J. Fleischmann, C. Melkonyan, D. Vandervorst, W. Duguay, S. Rolland, N. Vurpillot, F. Blavette, D.