Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques
Titel:
Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques
Auteur:
Berdova, Maria Ylitalo, Tuomo Kassamakov, Ivan Heino, Jouni Törmä, Pekka T. Kilpi, Lauri Ronkainen, Helena Koskinen, Jari Hæggström, Edward Franssila, Sami