Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction
Titel:
Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction
Auteur:
Nayak, Sanjay Hsu, Tun-Wei Boyd, Robert Gibmeier, Jens Schell, Norbert Birch, Jens Rogström, Lina Odén, Magnus