Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films
Titel:
Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films
Auteur:
Karimi Aghda, Soheil Holzapfel, Damian M. Music, Denis Unutulmazsoy, Yeliz Mráz, Stanislav Bogdanovski, Dimitri Fidanboy, Gönenç Hans, Marcus Primetzhofer, Daniel Méndez, Alba San José Anders, André Schneider, Jochen M.