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                                       Details for article 29 of 29 found articles
 
 
  Wake-up free Hf0.5Zr0.5O2 thin film with enhanced ferroelectricity and reliability synthesized by atomic layer crystallization induced by substrate biasing
 
 
Title: Wake-up free Hf0.5Zr0.5O2 thin film with enhanced ferroelectricity and reliability synthesized by atomic layer crystallization induced by substrate biasing
Author: Chou, Chun-Yi
Chen, Hsing-Yang
Jiang, Yu-Sen
Lin, Hsin-Chih
Chen, Miin-Jang
Appeared in: Acta Materialia
Paging: Volume 228 () nr. C pages p.
Year: 2022
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 29 of 29 found articles
 
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