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Effect of residual impurities on polarization switching kinetics in atomic-layer-deposited ferroelectric Hf0.5Zr0.5O2 thin films |
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Titel: |
Effect of residual impurities on polarization switching kinetics in atomic-layer-deposited ferroelectric Hf0.5Zr0.5O2 thin films |
Auteur: |
Lee, Dong Hyun Yu, Geun Taek Park, Ju Yong Kim, Se Hyun Yang, Kun Park, Geun Hyeong Ryu, Jin Ju Lee, Je In Kim, Gun Hwan Park, Min Hyuk |
Verschenen in: |
Acta Materialia |
Paginering: |
Jaargang 222 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Acta Materialia Inc. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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