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High resolution determination of local residual stress gradients in single- and multilayer thin film systems |
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Title: |
High resolution determination of local residual stress gradients in single- and multilayer thin film systems |
Author: |
Treml, R. Kozic, D. Zechner, J. Maeder, X. Sartory, B. Gänser, H.-P. Schöngrundner, R. Michler, J. Brunner, R. Kiener, D. |
Appeared in: |
Acta Materialia |
Paging: |
Volume 103 () nr. C pages 616-623 |
Year: |
2016 |
Contents: |
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Publisher: |
The Author(s) |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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