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Journal description
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Details for article 2 of 104 found articles
| Title: |
A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication |
| Author: |
Xu, Hong-Wei Qin, Wei Hu, Jin-Hua Sun, Yan-Ning Lv, You-Long Zhang, Jie |
| Appeared in: |
Advanced engineering informatics |
| Paging: | Volume 59 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 104 found articles
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