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                                       Details for article 5 of 8 found articles
 
 
  Fabrication of oxide-gate thin-film transistors using PECVD/PLD multichamber system
 
 
Title: Fabrication of oxide-gate thin-film transistors using PECVD/PLD multichamber system
Author: Matsuki, N
Ohta, J
Fujioka, H
Oshima, M
Yoshimoto, M
Koinuma, H
Appeared in: Science and technology of advanced materials
Paging: Volume 1 (2000) nr. 3 pages 4 p.
Year: 2000
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 8 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands