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Journal description
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Details for article 37 of 72 found articles
| Title: |
Interface property of silicon nitride films grown by inductively coupled plasma chemical vapor deposition and plasma enhanced chemical vapor deposition on In0.82Al0.18As |
| Author: |
Shi, Ming Tang, Hengjing Shao, Xiumei Huang, Xing Cao, Gaoqi Wang, Rui Li, Tao Li, Xue Gong, Haimei |
| Appeared in: |
Infrared physics and technology |
| Paging: | Volume 71 (2015) nr. C pages 5 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 37 of 72 found articles
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