Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays
Titel:
Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays
Auteur:
Forsberg, Fredrik Roxhed, Niclas Fischer, Andreas C. Samel, Björn Ericsson, Per Hoivik, Nils Lapadatu, Adriana Bring, Martin Kittilsland, Gjermund Stemme, Göran Niklaus, Frank