Effective suppression of surface leakage currents in T2SL photodetectors with deep and vertical mesa sidewalls via TMA and H2 plasma combined pretreatment
Titel:
Effective suppression of surface leakage currents in T2SL photodetectors with deep and vertical mesa sidewalls via TMA and H2 plasma combined pretreatment
Auteur:
Tan, Bo Cheng, Sufen Liu, Bin Zhou, Wenhong Liu, Yongfeng Zhang, Chuanjie Cao, Shensong Ding, Yanyan Yang, Zhaochen Huang, Li