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Details for article 1 of 14 found articles
| Title: |
Applicability of dynamic mechanical analysis for CMP polyurethane pad studies |
| Author: |
Lu, H. Obeng, Y. Richardson, K.A. |
| Appeared in: |
Materials characterization |
| Paging: | Volume 49 (2002) nr. 2 pages 10 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 14 found articles
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