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  Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
 
 
Title: Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
Author: Abel, Johann J.
Apell, Jonathan
Wiesner, Felix
Reinhard, Julius
Wünsche, Martin
Felde, Nadja
Schmidl, Gabriele
Plentz, Jonathan
Paulus, Gerhard G.
Lippmann, Stephanie
Fuchs, Silvio
Appeared in: Materials characterization
Paging: Volume 211 () nr. C pages p.
Year: 2024
Contents:
Publisher: The Authors
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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