Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
Title:
Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
Author:
Abel, Johann J. Apell, Jonathan Wiesner, Felix Reinhard, Julius Wünsche, Martin Felde, Nadja Schmidl, Gabriele Plentz, Jonathan Paulus, Gerhard G. Lippmann, Stephanie Fuchs, Silvio