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Details for article 2 of 56 found articles
| Title: |
Analysis of (Al,Cr,Nb,Ta,Ti)-nitride and -oxynitride diffusion barriers in Cu-Si interconnects by 3D-Secondary Ion Mass Spectrometry |
| Author: |
Kretschmer, Andreas Bohrn, Fabian Hutter, Herbert Pitthan, Eduardo Tran, Tuan Thien Primetzhofer, Daniel Mayrhofer, Paul Heinz |
| Appeared in: |
Materials characterization |
| Paging: | Volume 197 () nr. C pages p. |
| Year: |
2023 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 56 found articles
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