Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties
Titel:
Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties
Auteur:
Peter, Antony Premkumar Carbonell, Laureen Schaekers, Marc Adelmann, Christoph Meersschaut, Johan Franquet, Alexis Richard, Olivier Bender, Hugo Zsolt, Tokei van Elshocht, Sven