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Journal description
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Details for article 5 of 9 found articles
| Title: |
Implementation of a geometrically based criterion for film uniformity control in a planetary SiC CVD reactor system |
| Author: |
Parikh, Rinku P. Adomaitis, Raymond A. Oliver, James D. Ponczak, Brian H. |
| Appeared in: |
Journal of process control |
| Paging: | Volume 17 (2007) nr. 5 pages 12 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 9 found articles
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