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Journal description
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Details for article 13 of 23 found articles
| Title: |
Integrated system and control design of a one DoF nano-metrology platform |
| Author: |
Saathof, Rudolf Thier, Markus Hainisch, Reinhard Schitter, Georg |
| Appeared in: |
Mechatronics |
| Paging: | Volume 47 (2017) nr. C pages 9 p. |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 23 found articles
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